磁控反应溅射氧化镍薄膜电致变色特性的研究

The Electrochromic Properties of Nickel Oxide Films Prepared by Magnetron reactive Sputtering

本文介绍了直流磁控反应溅射制备的氧化镍薄膜。研究了所沉积的氧化镍薄膜的电致变色性能、响应速度、开路记忆能力及循环寿命。实验结果表明：氧化镍薄膜初始态透射率和电化学测试方法与条件的选择对其电致变色性能有较大的影响。

The nickel oxide films deposited by DC magnetron reactive sputtering are introduced. The electrochromic porperties, response time,open circuit memory and cycling lifetime of the nickel oxide films were studied. The experimental results indicated that the selection of the transmittance of virgin films,electrochemical testing ways and condition all have effect on the electrochromic properties of nickel oxide films.