在硅和硬质合金基体上金刚石薄膜生长研究

GROWTH OF DIAMOND FILMS ON Si AND WC-Co SUBSTRATE

在硅和硬质合金基体上，用热丝CVD法生长出金刚石薄膜。利用X衍射、拉曼谱和扫描电镜对金刚石薄膜的结构形貌进行了检测，并与天然金刚石对比分析。

The paper describes the synthesis of diamond films on the silicon and the hard alloy substrate by hot filament CVD technique. The crystal structure diamond films and the inclusion of the amorphous carbon of the deposited films are analyzed by X-ray diffraction, Raman spectroscopy, and scanning electron microscopy (SEM). The results are compared with the given valus of natural diamond crystal. The comparative result is most satisfactory.