摘要
对微细加工工艺中常用的三种套准方法做了详细的分析比较，并着重分析了最近发展起来的利用图像间的相关性实现套准的相关法，它能达到较高的套准精度，并具有一些独到的特点。
Three metheds of alignment in microcircuit fabrication have been carefully analyzed in this paper. In particular,a new alignment method, which attains alignment by using correlation between two patterns,has been emphasized because of higher accuracy and other special characteristices.
出处
《真空科学与技术》
CSCD
1994年第5期360-365,共6页
Vacuum Science and Technology
关键词
微细加工
电子束曝光
套准技术
相关法
Microcircuit fabrication, Technique of alignment, Correlation
