Al_2O_3陶瓷基片沉积钼膜的织构研究

INVESTIGATION ON TEXTURE OF MOLYBDENUM FILMS DEPOSITED ON Al_2O_3 SUBSTRATES

采用蒸镀、离子束辅助沉积（IBAD）技术，在Al2O3（单晶、多晶）和玻璃基片上沉积钼膜，通过XRD，TEM等分析手段对于钼膜的织构及其产生机理进行了探讨。结果表明：在单晶和多晶A2O3以及非晶态玻璃基片上蒸镀的钼膜均存在强（110）织构。对于IBAD薄膜，随着氩离子轰击能量的增加，（110）织构向（200）织构转变。膜内应力计算及TEM观察结果证实，钼膜发生了塑性流变，而且塑性流变具有不均匀性。塑性流变的结果使得钼膜产生了（110）织构。

Molybdenum films were deposited on polycrystalline Al2O3,single crystal Al2O3 (0001)and glass substrates by E-gun evaporation and ion-beam assisted deposition (IBAD). The texture of the films have been studied by XRD and TEM. The results show that a strong (110) texture in the films deposited by evaporation is changed to (200) texture by increasing the energy of Ar+ bombardment. Calculation of the stress in the film and the TEM observation indicate that there is a change of non-uniform plastic flow in the aolybdenum film which results in the (100) texture.