摘要
介绍了纳米材料研究的产生、现状以及这类材料的特性。着重介绍了几种具有不同用途的纳米薄膜的结构特性、制备方法和性能特点。
It has introduced the appearance and present status of nanometer material research.also the special properties of this kind of materials. The article has specially introduced the structural characteristics.preparation method and characteristic properties of several nanometer films according to differeni application.
出处
《真空与低温》
1994年第3期162-168,共7页
Vacuum and Cryogenics