恒压式微流量计的研制

A constant pressure low range flowmeter

介绍了恒压式微流量计的设计原理和参数的选择方法，并给出了实验结果，流量测量范围为３．４９～１．９７×１０－５Ｐａ·Ｌ／ｓ，不确定度小于２．２５％。该微流量计己用于动态流量法校准系统和低温泵的抽速测量之中。

In this pap re the design principle and selection rules of the parameters of the constant pressure low range flowmeter are intoduced.The ezperiment results are given.The measurement range is 3.49～1.97×10-5pa·L/:,and the uncertainty is less than 2.25%·The flowmeter has been used in the dynamic flow method system for calibration and the cryopump speed measurement。