摘要
介绍了恒压式微流量计的设计原理和参数的选择方法,并给出了实验结果,流量测量范围为3.49~1.97×10-5Pa·L/s,不确定度小于2.25%。该微流量计己用于动态流量法校准系统和低温泵的抽速测量之中。
In this pap re the design principle and selection rules of the parameters of the constant pressure low range flowmeter are intoduced.The ezperiment results are given.The measurement range is 3.49~1.97×10-5pa·L/:,and the uncertainty is less than 2.25%·The flowmeter has been used in the dynamic flow method system for calibration and the cryopump speed measurement。
出处
《真空与低温》
1994年第4期201-204,226,共5页
Vacuum and Cryogenics
关键词
气体微流量
测量
流量计
Gas low range flow mearsurement,flowmeter。