摘要
针对半导体扩散炉温度控制问题,提出神经网络控制方法.神经网络采用3-3-3结构.仿真表明,此控制方法是可行的,具有良好的控制品质.
According to the problem of temperature control of semiconductor diffuse furnace, an new control approach is described in the paper, such as NN. the NN construct is 3-3-3,simulation results show that the control method has high quality.
出处
《河西学院学报》
2005年第2期25-26,共2页
Journal of Hexi University
关键词
半导体扩散炉
神经网络
温度控制
Semiconductor Diffuse Kiln
NN
Temperature Control
