摘要
基于自主设计研制的FSGJ 3 型非球面数控加工中心,针对口径φ108 mm凸非球面透镜(曲率半径R=318 mm,k=-3),研究了非球面粗抛光工艺、精抛光工艺、抛光设备、磨料以及相关工艺参数,提出了规范的中小口径非球面加工的工艺方法和新型轮式抛光技术,实现了中小口径非球面元件的数控快速精密铣磨成型,且保证了光学零件具有较高的面形精度。抛光后元件面形精度达到0.306λ(PV)、0.028λ(RMS) (λ=0.632 8μm)。满足了在光学系统中使用非球面零件,明显改善像质,提高光学特性,减少光学零件数目,从而简化系统结构,减小系统体积,减轻系统质量的目的。
Based on aspheric computer controlled manufacturing center (FSGJ-3), as for φ108 mm aspheric lens (R = 318 mm, k = -3), the polishing equipment, tools, abrasives and testing method used in polishing are researched. Wheeled polishing technology for the middle or small aspheric lens is introduced. It's showed that the final surface figure of the lens is 0.306 λ(PV), 0.028 λ(RMS) (X = 0.6328 μm). Discussing and analyzing the key technology of middle or small aspheric lens in detail, supplies a basic technology guarantee for aspheric optical component to reduce the size, weight and complexity of decreasing the number of surfaces required to form unaberrated images.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2005年第2期198-204,共7页
Optics and Precision Engineering
基金
国家自然科学基金资助(No.60178037)
关键词
非球面透镜
轮式抛光技术
面形精度
Abrasives
Computer control systems
Digital control systems
Machining centers
Polishing
Polishing machines
Testing
