MEMS技术的现状与应用

The Development and Application of the MEMS

微机电系统(MEMS)技术是一门新兴的技术,它把信息系统的微型化、多功能化、智能化和可靠性水平提高到新的高度。近年来,对MEMS的技术发展、加工工艺及其产业化的研究已被越来越多的人所重视。介绍了MEMS的特点、特征、技术发展趋势,MEMS器件的类型及其功能,并以多层弯曲磁芯结构微执行器为例介绍了磁驱动微执行器工作原理与制作工艺过程。

MEMS (Micro-Electromechanical System)technology is an newly developed technology,which introject the microelectronic technology and the precision machine machining technology.Recently more and more people take into account the technology,fabrication craft and industrialization of the MEMS . In this paper, the feature and the development trend of the MEMS technology are introduced.And the operational principles and the fabrication craft of the magnetic micro-actuator with a multilevel meander are discussed also.