超精密机床开放式测量系统的研究

Research on Open Type Measuring System for Ultra-Precision Machine Tools

作为重点技术攻关项目，超精密机床的研制关键在于在线检测系统能否准确地定位测量。本文研究了精密定位测量系统，采用开放式体系结构，因而使系统具有通用性好、适应性强、采集速度快、结构紧凑的特点，为实现超精密加工奠定了基础。

Accurately position measuring of online measuring system is the key in developing of ultra-precision machine tool. In this article, a research on precision position measuring system is made. An open type system, featuring wide applicability, high adaptability, high sampling speed and compact in constructure,is a base for ultra-precision machining.