摘要
在用离子探针测定LiNbO3晶体时,电荷积累会反过来阻止一次离子束的轰击,本底噪音和多原子离子干扰会影响测定的信号。本文报道了我们的测定方法、结果和存在问题。
During determing LiNbO, crystal by ion microprobe, the charges due to the primaryion bombardment can in turn arrest the bombardment of the primary ion, the background noises of instrument and the polyatomic ions can interference measured signal.In this paper the determination method, some results and present problems were reported.
出处
《质谱学报》
EI
CAS
CSCD
1994年第1期38-41,共4页
Journal of Chinese Mass Spectrometry Society
关键词
铌酸锂晶体
离子探针
深度分析
LiNbO_3, crystal, SIMS, ion microprobe, depth profile determination of ionimplanted sample