热电子轰击气体离子源若干结构与工艺问题

Several Problems on the Structure and Technology of Ion Source of Thermo electron Bombardment Gas

本文仅对热电子轰击气体离子源设计中有关结构和工艺方面存在的若干问题进行了论述，并通过离子轨迹模拟实验和离子源结构调节实验定性定量地阐明了离子源电极的数量、形状、几何尺寸及电参数对离子源性能的影响。同时，给出了部分图形和数据，供离子源设计者参考。

Ion source design is extremely important in developing a mass spectrometer. Performance of an ion source depends on many factors of each electrode such as structure,shape,size and electric parameters. In this study ion motion trace is revealed by simulating experiments,which for those who are interested in this field,may e.nhance their perceptual knowledge and imagery concept of potential distribution inside ionization region of an ion source and tendency of ion motion so as to make them undersand more about the focus changes of ion beam under the condition of different structures and electric parameters. In addititon,this paper expounds which ion source is worthwhile to be first selected by the performance comparison of the ion sources with different structure;it alsogives, as far as possible,an exposition of the effects of structural characteristics,electrode number,shape,geometry and electric parameter on the ion source performance by the experiment of structural adjustment. Some graphs and data are provided for reference.