CCD—SIMS图像数字处理系统及其在马口铁抗腐蚀性能研究中的应用

CCD-SIMS Image Digitized Detection System and Its Application to the Tin Anticorrosion Study

由于ＳＩＭＳ具有高的杂质检测灵敏度，并能进行全元素分析，所以在微电子、冶金、地质等领域得到广泛应用。近年来，随着ＳＩＭＳ图像数字化处理系统的开发，进一步开拓了ＳＩＭＳ的三维微分析功能［１］。通过一次实验即可完成杂质元素的线分布、面分布和微区深度分布的三维分析。本文通过马口铁抗腐蚀性能分析结果，简要介绍ＣＣＤ－ＳＩＭＳ图像数字系统的原理和有关功能。

This paper presents the construction of a prototype system consisted of charge coupled devices (CCD), detecting and digitizing secondary ion images. Since the inventionat Bell Laboratories in 1970, CCD has been used as detectors spanning variety of electro-optical and ion-optical applications due to its some good performances, such as low noise, high dynamic range, liner response and three-dimensional analytical ability so that it has been prompted into the applications as a detector in ion microscopy. We applied CAMECA IMS-3f equipped with CCD detecting system to study the 3-D structures of tin.