摘要
双光子吸收几率与光强度的平方成正比,因此,双光子吸收引发光致聚合局限在紧密聚焦的焦点区域,通过控制焦点的扫描运动可实现高精度三维加工。基于该原理,提出了一种利用飞秒激光进行微细加工的技术。根据此技术,建立了飞秒激光三维微细加工系统,该系统包括光源系统、显微镜系统、实时监测系统和精密移动系统等。研究发现,该系统加工的直线线宽最小可达500nm;加工线宽与加工速度成反比;激光功率为2mW时,最大和最小临界加工速度分别为80μm/s和1μm/s;制备出线宽1μm,宽度5μm的“CHINA”复杂结构,以及杆间距、层间距均为5μm的三维木堆型光子晶体结构。实验证实,该技术是一种非常灵活的微细加工技术。
The photo-polymerization induced by Two-Photon Absorption (TPA) is tightly confined in the focus because the efficiency of TPA is proportional to the square of intensity. Three-dimensional (3D) micro-fabrication can be achieved by controlling the movement of the focus. Based on this theory, a system for 3D-micro-fabrication with femtosecond laser is proposed. The system consists of a laser system, a microscope system, a real-time detection system and a 3D-movement system, etc. The precision of micro-machining reaches a level down to 500 nm linewidth. The linewidth is inverse proportional to micro-fabrication speed with max and min threshold speed respectively 80 μm/s and 1 μm/s when the power is 2 mW. A CHINA model with width of 1 μm is made, and a wood-pile 3D photonic crystal structure with log and layer space of 5 μm is fabricated. Experimental results demonstrate this technique is very flexible.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2005年第4期93-96,共4页
Opto-Electronic Engineering
基金
国家自然科学基金面上项目(50275069
50375068)
关键词
三维微细加工
飞秒激光
双光子吸收
光聚合
Three-dimensional micro-fabrication
Femtosecond laser
Two-photon absorption
Photo-polymerization