SOI CMOS器件及其应用

SOI CMOS Device and Its Application

介绍SOI技术及其形成方法。介绍SOICMOS器件的优点、全耗尽(FD)SOICMOS器件的特点及其应用。

The SOI technology and its formative method are introduced. The merits of the SOI CMOS device, the characteristics of the fully depleted (FD) SOI CMOS device and its application are also introduced.