Twinning in Low-Temperature MOCVD Grown GaN on (001) GaAs Substrate

低温MOCVD法沉积的GaN/GaAs(001)薄膜中的孪晶现象(英文)

GaN buffer layers (thickness ～60nm) grown on GaAs(001) by low-temperature MOCVD are investigated by X-ray diffraction pole figure measurements using synchrotron radiation in order to understand the heteroepitaxial growth features of GaN on GaAs(001) substrates.In addition to the epitaxially aligned crystallites,their corresponding twins of the first and the second order are found in the X-ray diffraction pole figures.Moreover,{111} φ scans with χ at 55° reveal the abnormal distribution of Bragg diffractions.The extra intensity maxima in the pole figures shows that the process of twinning plays a dominating role during the growth process.It is suggested that the polarity of {111} facets emerged on (001) surface will affect the growth-twin nucleation at the initial stages of GaN growth on GaAs(001) substrates.It is proposed that twinning is prone to occurring on {111}B,N-terminated facets.

采用同步辐射XRD极图法对低温MOCVD生长的GaN缓冲层薄膜进行了研究.极图研究表明,低温GaN 薄膜中除有正常结晶外还存在一次孪晶和二次孪晶.在χ固定为55°时的{111}φ扫描中发现了异常的Bragg衍射峰,表明GaN/GaAs(001)低温生长中孪晶现象非常明显.GaAs(001)表面上出现的{111}小面极性会在生长初期影响孪晶成核,实验结果表明孪晶更易在{111}B面即N面上成核.