摘要
研究了在氩氧气氛下近空间升华沉积CdTe的技术.发展了在表面十分平整的玻璃衬底上沉积优质CdTe薄膜的方法,对比了在玻璃衬底和CdS薄膜上CdTe薄膜的结构特征.通过研究氧分压对CdTe薄膜择优取向的影响,证实了在恰当的近空间升华沉积过程中,两种衬底上的CdTe薄膜具有相同的结构.研究了玻璃衬底上CdTe薄膜的电学与光学性质,观察了后处理对上述薄膜性质的影响,并研制出了效率达13.38%的小面积CdTe薄膜太阳电池.
s:In order to further decrease the fabrication cost of CdTe thin film solar cells,a technology of closed space sublimation (CSS) in Ar+O_2 atmosphere is studied.Specially,a method of depositing CdTe thin films on smooth glass substrate is developed and the structural characteristics of CdTe films,which are deposited on two kinds of substrate,i.e. glass and CdS film,are compared.The effect of O_2 fractional pressure on the preferred-orientation is investigated,which shows that there are the same structures of CdTe thin films on both kinds of substrate if these films are deposited in an appropriate CSS process.Then,the optical and electrical properties of CdTe films on glass substrate are researched,and the effects of post-treatment on the properties are observed.Based on these research results the small area CdTe thin film solar cells with efficiency of 13.38% is prepared.
基金
国家高技术研究发展计划资助项目(批准号:2001AA513010)~~
