摘要
利用Mo/W/Ti/Au难熔金属作为发射极欧姆接触设计并制作了一种用于功率放大器的新结构AlGaInP/GaAs双异质结双极晶体管(DHBT),分析了与传统AuGeNi作为接触电极的AlGaInP/GaAsDHBT的直流特性差异.研究结果表明,利用难熔金属作为欧姆接触电极的DHBT器件具有较好的高温特性,并进一步分析了其具有良好高温特性的机理.
A novel AlGaInP/GaAs double heterojunction bipolar transistor (DHBT) is designed and fabricated for power amplifiers.DC characteristics of AlGaInP/GaAs DHBT are studied.We also investigate the difference of DC characteristics between high-temperature DHBT and conventional DHBT.In addition,several electrical factors affecting high-temperature characteristics are discussed in detail.
基金
国家自然科学基金(批准号:69576035)
上海应用材料研究与发展基金资助项目~~