垂直腔面发射激光器的热学特性

Thermal Characteristics of VCSELs

通过求泊松方程、电流密度方程、载流子扩散方程以及有源层结压降方程自洽解的方法,计算了垂直腔面发射激光器(VCSEL)的电势分布,进而求解热传导方程,得到VCSEL的温度分布.详细分析了注入电流密度小于或等于阈值电流密度时,晶片键合结构垂直腔面发射激光器的键合界面阻抗、氧化层限制孔径、外加电压以及分布布拉格反射镜的热导率的大小对VCSEL内部温度分布的影响.

The voltage distribution inside the vertical-cavity surface-emitting lasers(VCSELs) are calculated by using a method of finding self-consistent solutions for the Poisson’s,injected current density,carrier diffusion,and voltage drop equations,and the temperature distribution inside the VCSELs are obtained subsequently by solving the thermal conduction equation.The influences of the electrical resistance of the fused interface,the oxide aperture size,the applied voltage,and the thermal conductivity value of the distributed Bragg reflectors on the temperature distribution inside the single-fused VCSELs below and at the threshold are analyzed in detail.