计算全息用于非球面检测的研究

The Research of CGH for Testing Aspheric Surface

为了实现对非球面的高精确度检测,提出,采用计算全息补偿干涉测量原理检测二元旋转对称非球面,分析了检测光路,推导出全息图条纹位置计算公式,得到了用于非球面检测的计算全息图样,并对测量光路进行了仿真分析,结果表明,计算全息补偿干涉测量法测量的均方差值比传统的干涉测量法小.

For testing aspheric surface more precisely, the authors present the computer generated hologram (CGH) used for testing aspheric surface, and analyze the optical path that is used for testing aspheric surface,deduing the position of CGH stripes for testing binary axially symmetric aspheric surface, and obtaining the CGH pattern equation. According to the research result, the authors simulate and analyze the optical testing path. The result of simulation shows the testing method of CGH compensating for diffraction can measure the aspheric surface with the higher precision than conventional method, and the RMS is less.