异型声表面波器件特性分析

Analysis of Characteristics of Non Conventional Type Surface Acoustic Wave Device

报道了在128°旋转Y切割X传播方向的LiNbO3 压电基片上研制的异型声表面波器件,它将输入换能器激发的声表面波轴对称分成两路,分别由各自输出换能器检测输出.应用耦合模理论和P矩阵法详细分析自行研制的异型声表面波器件在输入换能器激发,一输出换能器检测输出及在非正常工作模式下,一输出换能器激发,另一换能器检测输出时的特性,并应用网络分析仪测量上述情况下的异型声表面波器件特性.结果表明,理论计算值与实验结果相近,尤其是耦合模理论得到的器件特性更接近于实验结果.本文研究为分析声表面波器件提供一种有效的分析工具.

A non conventional type SAW device fabricated on 128° rotated Y cut X LiNbO 3 is reported. SAW excited by input IDT is axisymmetrically divided into two paths detected by their output IDT. Characteristics of non conventional type surface acoustic wave device are analyzed using the coupling-of-mode theory and P matrix representation in detail, when SAW is excited by input IDT or one output IDT, is detected by another output IDT. At the same time, characteristics of non conventional type surface acoustic wave device are measured by network analyzer. Results show that theoretical values especial obtained by coupling-of-mode theory are near to measured values. A tool for analyzing surface acoustic wave device is established.