摘要
用sol-gel法在玻璃载玻片上旋涂3～9层制备氧化锌薄膜.用X射线衍射、扫描电镜等研究了掺Li、旋涂层数、溶胶的浓度以及热处理温度对氧化锌薄膜(002)定向性的影响.结果表明,溶胶中掺入一定量的Li可显著地促进ZnO沿(002)生长;浓度为0.45mol/L旋涂3层或浓度为0.25mol/L旋涂7层的样品,即使有Li的掺入也不能呈现较好的(002)定向性,这是由于薄膜太薄所致;提高热处理温度至610℃,有利于薄膜(002)高度定向.
ZnO films were prepared on glass substrates by a sol-gel spin-coating method from 3 to 9 layers. The effects of doping Li , spin-coating layers, sol concentration and heat-treatment temperature on (002) orientation of ZnO films were investigated by XRD patterns and SEM photos. The results indicate that doping Li could promote the grains of ZnO growing along (002) plane, and for 3 layers(0.45 mol/L) or 7 layers(0.25mol/L) samples, there exited other peaks besides (002) in the XRD patterns even when doping Li, it due to the films too thin. It also showed that heightening heat-treat temperature to 610℃ was helpful for preferred orientation along (002) plane.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2005年第5期30-32,共3页
Electronic Components And Materials
基金
上海市教育委员会"材料学"重点学科资助项目
