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射频微机械可变电容的研究与进展 被引量：2

Research and Progress of Micromachined Variable Capacitors
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摘要 对国内外有关微机械可变电容的研究做了综合阐述,包括改变介质的可变电容、改变重叠面积的可变电容和改变间隔的可变电容。并对其中有代表性的电容结构进行了说明,对其获得的零偏压下的电容量值、Q值以及调节范围进行了比较。 The studies of micromachined tunable capacitors in the world are summarized. Thesecapacitors are dielectric changed variable capacitors, overlap areas changed variable capacitors andgap changed variable capacitors. Among these, the representative structures are explained. Capaci-tance under zero voltage, quality factor and tuning rage are compared.
作者 李丽 张志国 邓海丽 赵正平 杨瑞霞
机构地区 河北工业大学信息工程学院 石家庄信息工程职业学院
出处 《半导体技术》 CAS CSCD 北大核心 2005年第5期35-39,共5页 Semiconductor Technology
关键词 射频微机械 可变电容 Q值 调节范围 RF micromachined variable capacitor quality factor tuning range
分类号 TB43 [一般工业技术]
  • 相关文献

参考文献15

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二级参考文献3

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共引文献5

同被引文献24

  • 1李锐,廖小平,黄庆安.微加工射频可变电容的研究与进展[J].电子器件,2004,27(2):366-371. 被引量：4
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  • 4Young D J,Tham J L,Boser B E. A micromachine-based low phase-noise GHz voltage-controlled oscillator for wireless communications. Technical Digest of the 10th International conference on solid-state sensors and actuators, Sendai, Japan, 1999:1386
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  • 10DEC A, SUYAMA K. Micromachined electro-mechanically tunable capacitors and their applications to RFIC's [J]. IEEE Transactions on Microwave Theory and Techniques, 1998, 46 (12): 2587-2596.

引证文献2

二级引证文献5

半导体技术
2005年 第5期

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