用不同中间层微波连接氮化硅陶瓷

Microwave Joining of silicon Nitride with Different interlayers

研制的微波连接装置由微波源、单模谐振腔、红外光纤测温仪、焊件加压机构和真空及抽气系统组成。并在此装置上用不同中间层材料对氮化硅陶瓷进行了微波连接。

A high-quality-factor single-mode microwave cavity was designed and manufactured for the microwave joning of ceramic materials. The joining experiments on silicon nitride ceramic were performed using various kinds of joining interlayers in this cavity. Joints between silicon nitride can be made by microwave heating within just 5 to 13 minutes,under the condition of 7 MPa axial pressure and powder embedding procedure. The mierostructure of the joint obtained is very similar to that of the base material. It shows a sintering result inside the ceramic interlayer, and the joining between interlayer and base material is believed mainly a diffusion process. And joints obtained with Al foil interlayer exhibited a very different diffusion behaviour from that in the conventional brazing.