苯甲酸质子交换LiTaO_3波导及其退火性能的研究

Study of the Proton-exchanged LiTaO_3 Waveguide in Benzonic Acid and Its Annealing Property

报道了在苯甲酸中制作质子交换ＬＩＴａＯ３光波导的方法和波导的退火特性，给出了退火前后波导层中折射率的分布，计算了波导层的表面折射率增量和扩散系数，结果表明波导层表面折射率增量和退火时间与交换时间的比值有关。

The fabricating method and the annealing properties of the ptoton-exchangedLiTaO_3 waveguide are reported in this Paper. The refractive index Profiles of the waveguidelayer before and atter annealing are given,and the surf ate refractive index increment andthe diffusion coefficients are caculated. It is show that the refractive index increment of thewaveguide correlates with the ratio between the annealing time and the exchanging time.