钛的ns脉冲激光氮化

Nitridation of Titanium by ns Laser Pulses

报道用５ｎｓ脉冲激光通过激光气体合金化形成氮化钛的研究。通过探测发射光谱观察了氨化过程，用光学显微镜和扫描电子显微镜观察了氨化层的表面形貌，激光烧蚀飞行时间质谱和Ｘ射线衍射标征了氮化层。激光脉冲起着熔化钛表面和激活氮的作用，导致钛的液相氮化。同时，也发现生成的氨化层是富Ｔｉ的，由δ－ＴｉＮ和α—Ｔｉ组成。

Studies of formation of titanium nitride layer with laser gas alloying by multipulselaser irradiation of 5-ns duration are described.The nitridation process was observed bydetecting the light emitted above the surface while it is irradiated. The nitrided surface wasmorphology-examined by an optical microscope and a scanning electron microscopy(SEM)and characterized by time of light mass spectrum(TOFMS) during laser ablation of thesurface as well as by X-ray diffraction (XRD).The laser pulses melt the titanium surfaceand activate N2,which leads to nitridation of titanium in liquid phase.It is also found thatthe nitride layer grown is rich in Ti and consists of δ-TiN andα-Ti.