具有分束和聚焦功能的氮化硅二元位相型光学元件

Silicon Nitride Binary-Phase Optical Elements with the Function of Splitting and Focussing

报道了自行设计的将二维Ｄａｍｍａｎｎ光栅和Ｆｒｅｓｎｅｌ波带板集成为一体的同时具有分束和聚焦功能的二元位相型光分束器，并用等离子体增强化学气相淀积法（ＰＥＣＶＤ）制备的非晶氨化硅（α－ＳｉＮｘ：Ｈ）薄膜制作了这样的元件，成功地实现了设计的功能，分束阵列为３×３，焦距为１８ｃｍ，分束后的光强分布相对误差小于５％。

Having both functions of beam splitting and focussing a home designed binaryoptical beam splitter combined with a two-dimensional Dammann grating and a Fresnel zone plate is reported.This element is achieved by means of amorphous silicon nitride thin films.The split arrays are 3×3 and the focus length is 18 cm.The relative distribution error of the split beam intensity is less than 5%.