摘要
采用电弧离子镀技术、TC7双相钛合金靶沉积TiAlCrFeSiBN薄膜,研究了这种多元膜的显微硬度、高温氧化性能和组织结构。结果表明:这种多元膜具有优于TiN膜的显微硬度;具有不同于TiN膜的显微组织,其最显著的特征是存在较多细小的钛滴,这些钛滴与膜之间的融合效果很好;膜层上孔隙较少;具有TiN的面心立方结构,与TiN膜相比,具有更加明显的择优取向趋势。
TiAlCrFeSiBN films have been deposited by cathode arc ion-plating with TC7 (α+β double phases) titanium alloy target. The performance and microstructure have been studied. The results show that the microhardness of the multi-component films is higher than that of TiN films. The films have excellent high temperature oxidation performance. The microstructure of the multi- component films is quite different from that of TiN films. The microstructure of the multi-component films is characteristic of many titanium droplets combined with the films substrate, and a few pores. It is found that the preferred orientation exists in the films.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2005年第4期648-652,共5页
Rare Metal Materials and Engineering
基金
广东省教育厅重点扶持学科项目(980012)
关键词
电弧离子镀
多元膜
显微硬度
高温氧化性能
cathode arc ion-plating
multi-component films
microhardness
high temperature oxidation performance
