VTE法制备γ-LiAlO_2/α-Al_2O_3复合衬底以及腐蚀和退火对其影响

VTE Preparation of Compound Substrates of γ-LiAlO_2/α-Al_2O_3 and Influence of Erosion and Annealing

通过气相传输平衡法(VTE)制备了γLiAlO2 /αAl2O3 复合衬底,使用5%的稀盐酸对其进行腐蚀并在900℃退火72h。利用X射线衍射、偏光显微镜及扫描电镜对复合衬底进行了分析,发现在白宝石a面(11 20)和γ面(1 102)均获得单相多晶的γLiAlO2,且后者的择优取向好于前者。腐蚀可以提高样品的择优取向,在5%的稀盐酸中,时间控制在2min左右可获得较好的结果。退火后γLiAlO2 颗粒质量得到改善,白宝石a面上γLiAlO2 的质量优于r面上的γLiAlO,两者都出现颗粒长大现象。

The compound substrates of γ-LiAlO2/α-Al2O3 were prepared by vapor transport equilibration (VTE), then eroded by hydrochloric acid with 5% concentration and annealed at 900°C for 72 h. The substrates were analyzed by XRD, polarizing microscope and SEM. It was observed that a single phase and multicrystalline γ-LiAlO2 was obtained on both (11-20) and (1-102) planes of the sapphire, and the preferred orientation of the latter was better than that of the former. The preferred orientation of the substrates was upgraded after erosion and the preferred results were got by erosion for 2 minutes. The property of grains of γ-LiAlO2 on (11-20) plane of sapphire was superior to that of (1-102) plane, and both kinds of grains appeared to grow up as well.