等离子体技术在提高硬质合金工具上金刚石薄膜附着力方面的应用

Applications of Plasma Technology on the Adhesion Improvement of Diamond Coatings on the Cemented Carbide Cutting Tools

金刚石薄膜具有优异的性能,作为切削工具表面的保护性涂层,可以大幅度提高工具的使用寿命以及加工精度。硬质合金是一种广泛使用的工具材料,在其表面沉积高附着力的金刚石薄膜时存在着困难。等离子体中离子、原子或分子具有高的反应活性,等离子体技术在金刚石薄膜的制备中有着广泛应用。利用等离子体技术可以极大的消除因金刚石薄膜与硬质合金基体之间存在热应力以及由硬质合金中的钴粘结剂在化学气相沉积金刚石薄膜过程中的促石墨化作用而产生的不利影响,提高金刚石薄膜与硬质合金基底之间附着力。本文综述了等离子体技术在提高硬质合金工具表面金刚石薄膜附着力方面的研究进展。

Diamond film has many unique properties. Diamond films on the cutting tools may prolong the tools life and improve the processing accuracy. Cemented carbide is a widely used material for cutting tools, but depositing diamond film onto the surface of the cemented carbide with strong adhesion is very difficult. Plasma includes many reactive species such as ions, atoms and molecules, and as result it has wide applications in the preparation of diamond films. Plasma technology can release the thermal stress between diamond and the cemented carbide, suppress the effect of promoting graphitization of the cobalt during the chemical vapor deposition and significantly improve the adhesion of the diamond films on the substrate of the cemented carbide. The progress of plasma technology in the improvement of diamond coating adhesion on the cemented carbide cutting tools is reviewed.