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微接触印刷法直接制备图案化TiO_2薄膜 被引量:2

Direct Preparation of Patterned TiO_2 Film with a Microstructure by Microcontact Printing Method
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摘要 A novel process to gain clear and high edge acuity micropatterns of TiO2 thin films by direct microcontact printing was presented in this paper. Using TiO2 sol as the “ink”, poly(dimethylsiloxane) elastomeric stamp was taken to transfer the TiO2 colloids to the substrate. The process is different from the traditional process using the SAMS to induce the deposition of TiO2. The new way increases the transferred efficiency of the micropatterned TiO2 thin films. The optical micrographs and SEM show that the micropatterned structures of TiO2 were microscale and uniform over a large area as well. A novel process to gain clear and high edge acuity micropatterns of TiO_2 thin films by direct microcontact printing was presented in this paper. Using TiO_2 sol as the “ink”, poly(dimethylsiloxane) elastomeric stamp was taken to transfer the TiO_2 colloids to the substrate. The process is different from the traditional process using the SAMS to induce the deposition of TiO_2. The new way increases the transferred efficiency of the micropatterned TiO_2 thin films. The optical micrographs and SEM show that the micropatterned structures of TiO_2 were microscale and uniform over a large area as well.
出处 《高等学校化学学报》 SCIE EI CAS CSCD 北大核心 2005年第5期939-941,F011,共4页 Chemical Journal of Chinese Universities
基金 国家"九七三"计划研究项目(批准号:2003CB716200) 国家自然科学基金(批准号:20473106)资助.
关键词 微接触印刷(μCP) 微结构 二氧化钛薄膜 Microcontact printing(μCP) Microstructure TiO_2 film
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