惯性式微动机构位移性能检测

The Testing of Displacemental Performance of an Inertial Slider

微机与电容传感器结合实现了惯性式微动机构位移性能的动静态检测，清晰地分辨出了驱动信号周期为５ｍｓ时微位移机构的响应波形．详细推导了测量系统的数学模型、非线性误差的表达式以及极板不平行造成测量误差的理论公式，并给出了误差抑制方法．本文还分析了环境温漂和弹性回复等因素对测量精度的影响．

A displacement testing device with a resolution of nanometers, which is composed of a capacitive sensor and a computer, has been developed and used to test the displacemental performance of an inertial slider. The responses of the inertial slider driven by 5ms period saw tooth have been worked out with a resolution of 5nm. In this paper the measuring principle and the nonlinear error are described in detail. The effects of the angle between two electrode planes of the capacitive sensor, as well as of environmental tempereture changing and of elastic recovering of the gap adjusting screw on the measuring results are also analysed in this paper.