提高SnO_2／ZnO薄膜气敏特性的穆谱研究

Mossbauer Studies on SnO_2/ZnO Thin Films to Improve Gas Sensing Performance

二次溅射薄膜ＳｎＯ２／ＺｎＯ是一种有用的气敏材料，本文用内转换电子穆谱（ＣＥＭＳ）方法，研究了它的气敏特性，实验结果表明，穆谱参数（同质异能移ＩＳ和四极分裂ＱＳ）随溅射时间和退火温度变化．与气敏特性变化规律相对照，由此找出了材料的最佳工艺参量，并讨论了气敏机理．

The SnO2/ZnO thin film prepared through two-time sputtering is a useful gasensitive material. The Conversion Electron Mossbauer Spectroscopy method was employed to any its gas-sensing performances. Experimental results show that the parameters of Mossbauer spectra isomer shift and quadrupole splitting vary with the sputtering time and the annealing temperature, and that both variances are in agreement with the response of the gas-sensing property. As a result, the optimum of the technique processing is obtained. The gas-sensitive mechsnism is discussed.