硅电容式压力传感器

Silicon Pressure Sensor of Capacitance

在广泛地比较了各种设计方案产业化的难易程度的基础上,最终确定了符合现有的工艺条件、易于产品化以及与其他产品生产相兼容的最佳方案,给出了MEMS的具体的工艺流程.

This paper, based on comparing the industrialization difficulty of many design plan, gives the best design plan, which accords with the condition of process and is easy to produce and compatible with other conductors. Finally, we give the detail process of the MEMS.