摘要
利用磁控溅射方法制备了纳米TiO2 薄膜,通过Raman光谱和UV Vis光谱讨论了TiO2 薄膜的带宽随着厚度变化的规律。随着薄膜厚度的增加,TiO2 薄膜的带宽变窄。
The TiO_2 films were prepared on Si (100) substrates by RF magnetic sputtering PVD. The bandgap width of nanometer TiO_2 thin films was investigated by using Raman spectra and Ultraviolet-visible (UV-Vis) Spectra. The bandgap width of TiO_2 thin films narrows with the increase of thickness due to nano-effects of nanometer thin films.
出处
《光散射学报》
2005年第1期16-18,共3页
The Journal of Light Scattering
基金
国家863项目No:2 0 0 2AA3 0 5 5 0 7)~~
