大行程高分辨率微定位机构的设计分析

Design and analysis of micro-positioning mechanism with large traveling range and high resolution

压电驱动器的位移输出能力有限,因此通常借助于柔性机构对其位移量进行放大。对常用的柔性放大机构的性能进行了分析。提出一种柔性八杆放大机构,并对其进行有限元分析和理论计算。为了提高放大率,提出两级串连式机构。机构整体具有结构紧凑、放大效率较高的优点。

The displacement output ability of piezoelectric actuator is limited, for this reason, it was commonly to carry out amplification on its amount of displacement with the aid of flexible mechanism. At here an analysis was carried out on the performance of the commonly used flexible amplification mechanism. A kind of flexible eight-link amplification mechanism has been put forward, and the finite element analysis and theoretical calculation were conducted upon it. A two staged series mechanism has been put forward so as to raise the rate of amplification. Entirety of the mechanism possesses the advantages of compact in structure and rather high amplification efficiency.