摘要
利用大型通用有限元仿真软件ANSYS7.0,对之字型微谐振器的简化力学模型进行静态和模态分析,得到水平方向的最大位移和谐振频率等重要性能参数。将仿真结果与理论分析计算的结果进行对比,两者有较好的一致性。
Based on ANSYS7.0,the general FEM simulation software,the simplified mechanical model of the microresonators with flexuous suspensions is analyzed through static and modal simulation. The important performance parameters are worked out,which include the maximum horizontal displacement and the resonant frequency. It's suggested that the theoretical and simulation results are accordant by the comparison between them.
出处
《微纳电子技术》
CAS
2005年第5期233-236,共4页
Micronanoelectronic Technology
基金
国家自然科学基金重点项目(50435040)
