之字型支撑梁硅微谐振器机械性能分析

Mechanics Performance Analysis of Microresonators with Flexuous Suspensions

与相同几何尺寸的其他支撑形式相比,之字型支撑梁降低了硅微谐振器的谐振频率。通过对之字型支撑梁硅微谐振器的力学建模分析,发现其为5次超静定问题,在此基础上得出了谐振频率等重要的性能参数随几何参数的变化关系。分析结果表明,在保证支撑梁垂直长度不变的条件下,对固定的折弯次数n,谐振频率fx 随折弯角度φ的增大而增大;对固定的折弯角度φ,谐振频率fx 随折弯次数n的增大而趋于一个固定值;φ=90°时则等效于双侧直脚型微谐振器。

Compared with the resonators supported by other kinds of beams in the same geometric size, the resonant frequency of microresonators with flexuous suspensions is lower. The mechanics performance analysis of microresonators with flexuous suspensions was presented. It is found that the simple mechanical model is a superfluous system with five unknown variables. And then the transformation rules of the resonant frequency have been founded. If the vertical length is fixed, it is illustrated that with the increments of the zig angle (φ) the resonant frequency (fx) increases when the zig amount (n) is a constant; while the resonant frequency increases with the increments of the zig amount and reaches to a fixed number when the zig angle is a constant. The double side straight-leg suspension structure is a special model of the flexuous suspensions when the zig angle equals to 90°.