波片相位延迟的分束差动自动测量

Intelligentized Measurement of Wave Plate Phase Retardation with Beam-splitting-differential Method

基于偏振调制原理,从琼斯矩阵理论出发,利用先进的Si探测器、锁相放大器和微处理器,设计并建立了一套测量相位延迟器延迟量的智能化测量系统,实现了数据的自动化处理.利用闭环反馈控制系统,对旋转角度进行了反馈控制.创建的测量系统具有测量精度高、重复性好、自动化程度高和操作简单的特点.测试结果表明:系统的测量范围为400～1 000 nm,测量准确度优于0.1%,测量的重复误差小于0.6%.测量系统在偏光测试领域有着广泛的应用.

According to the Jones matrix, the intelligent system for measuring retardation of wave plate has been designed and established and the automatic processing of the data was realized, based on the polarization modulation and use of advanced Si detector, lock-in amplifier and advanced microprocessor technology. The rotation angle was controlled by the feedback loop system. The purpose of this project is to improve the automatic degree and measurement accuracy, and to enlarge measurement range. The system has the features of high precision, good repeatability, high automatic degree and simple operation. The measurement result indicates that the measurement range is from 400 nm to 1000 nm, the measurement accuracy excels 0.1 percent, the repetitive error is less than 0.6 percent. So this measurement system can be widely used in polarization area.