摘要
详细论述了刻线边缘粗糙度问题的产生原因,线边缘粗糙度的定义以及目前采用的测量方法和分析方法,比较了线边缘粗糙度的测量工具,并讨论了测量线边缘粗糙度的技术障碍.
The background (reason) why line edge roughness is raised up, as well as the definition of line edge roughness according to ITRS is discussed. The current measurement and analysis method on line edge roughness are introduced and the measurement tools are compared. The technical barrier on the line edge roughness measurement is discussed also.
出处
《哈尔滨工业大学学报》
EI
CAS
CSCD
北大核心
2005年第5期674-678,共5页
Journal of Harbin Institute of Technology