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仿真技术在半导体生产调度中的应用 被引量:2

The Application of Simulation Technology in the Scheduling of Semiconductor Manufacturing
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摘要 对半导体制造系统的调度策略进行分析研究,在现有的产品排队策略研究的基础上,根据半导体生产的实际情况,同时考察机器在处理不同种类产品切换时间,建立仿真模型,通过仿真结果得出系统的主要生产性能参数。比较分析综合调度策略对系统生产性能的改善和提高。 After having a solid research in the Scheduling policy of semiconductor manufacturing, according to the practical situation, analyzing the setup time in case of machining different products as well as the products' queuing policy. Then set up simulation models and get the main performance parameters of the system from the simulation results. Finally analyze the effects of the comprehensive scheduling policy on the improving of the main performance of manufacturing system.
机构地区 上海交通
出处 《机械与电子》 2005年第2期68-70,共3页 Machinery & Electronics
关键词 调度策略 离散事件 系统仿真 EXTEND scheduling policy discrete event systemic simulation Extend
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参考文献6

  • 1Uzsoy R,et al.A view of production planning and scheduling models in the semiconductor industry part I: system characteristics,performance evaluation and production planning[J].IIE Trans,1992,24(4):47-60.
  • 2Kumar P R.Re-entrant lines queueing systems:theory and applications[J].Special Issue on Queueing Networks,1993,13(1):87-110.
  • 3Wein L M.Scheduling semiconductor wafer fabrication[J].IEEE Trans Semiconductor Manufacturing,1988,(1):115-130.
  • 4Lu S H,Kumar P R.Distributed scheduling based on due dates and buffer priorities[J].IEEE Trans on Automatic Control,1991,36(12):1406-1416.
  • 5闵春燕,王岩峰.仿真技术在半导体和集成电路生产流程优化中的应用[J].半导体技术,2003,28(10):33-36. 被引量:1
  • 6Liao Da-Yin,Chang Shi,Ren Shou,Chien Cheng-Chung.Daily scheduling for R&D semiconductor fabrication[J].Semiconductor Monufacturing,1996,9(4):550-561.

二级参考文献5

  • 1KEMPF K.Detailed description of multiple product reentrant semiconductor manufacturing system example,[R].Prepared report, Intel Corp, Tech, and Manufacturing Group, 1994,.
  • 2COLLINS D W,HOPPENSTEADT F C.Investigation of minimum inventory variability scheduling policies in a large semiconductor manufacturing facility[A].1997 American Control Conf[C]. Albuquerque, New Mexico, 1997
  • 3LU S C H, RAMASWAMY D, KUMAR P R.Efficient scheduling policies to reduce mean and variance of cycle-time in somiconductor manufacturing plants[J].IEEE Trans on Semiconductor Manufacturing, 1994,7, 374-385.
  • 4WEIN L M.Scheduling semiconductor wafer fabrication[J].IEEE Trans Semiconductor Manufacturing, 1988, 1, 115-130
  • 5KUMAR P R.Re-entrant lines[J].Queueing Systems:Theory and Applications: Special Issue on Queueing Networks, 1993,13, 87-110.

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