摘要
提出一种基于显微视觉伺服控制的MEMS器件微装配系统设计方案,描述了系统样机及关键技术模块的研制方案.以微型光谱分析仪极板粘接为示范应用开展了实验研究,表明该系统适用于典型MEMS芯片的微对准和封装研究.
A new microvision based microassembly system was designed.The system and key modules were described in detail.The system was used to complete the microalignment and felt of micro spectral analysis chips.Experiments show that the system is useful in microassembly of typical MEMS chips.
出处
《机械与电子》
2005年第5期31-33,共3页
Machinery & Electronics
基金
国家 八六三"MEMS重大专项(2002AA404450)
国防基础科研项目(k1401060130)
