离子氮化及等离子表面处理用脉冲电源及其应用

Pulsed Power Supply for Plasma Nitriding and It’s Application Results

脉冲电源是近年来在离子氮化及等离子表面处理领域发展的一项重要技术。本文阐述脉冲辉光放电的特点，介绍了用ＧＴＯ作开关元件的大功率脉冲电源的原理、电路特点及脉冲离子氮化的生产应用情况。脉冲电源能可靠迅速灭弧，散弧清洗速度快，能够消除或减弱空心阴极效应，解决了具有深孔或沟槽的复杂零部件和齿轮根部的氮化难题，易于选择最佳工艺参数，提高氮化质量，并比直流电源节约电能３０％左右。

Pulsed power supply plays an important role in the field of plasma nitriding andplasma surface treatment.The characters of pulse glow discharge are stated in the paper.Theprinciple of the pulsed power supply with GTO chopper,the distinguished features of the cir-cuit and it’s application to the plasma nitriding were introduced.Pulsed power supply has anumber of advantages such as energy saving by about 30%,restraining are discharge re-liably,repressing the dffect of the hollow cathode,improving the homogeneity of the temp-erature and the quality of the products.In particular,it is available for nitriding complicatedparts with small holes or narrow splits.