金属缺陷的分辨率研究

Resolution Research on the metal defect inspection

根据微小焦点X射线成像检测的基本原理,建立系统点扩展函数模型,并推导出检测系统的分辨率关系,最佳放大倍数以及最小检测缺陷公式。对成像检测具有指导作用。并给出在金属缺陷检测中的实际应用。

According to the basic microfocus X-ray theories,the system point-spread-functin model and the resolutions have been deduced.By the model ,the best magnification and minimum defection have been given.the formulas are used for guiding X-ray imaging technological process and have the leading function.Some applications are introduced.