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基于RBF神经网络精密定位预测控制研究 被引量:1

Research on precise alignment predictive control based on the RBF neural network
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摘要 为了实现高速高精度定位,在RBF神经网络单步预测模型的基础上,建立多步预测控制系统,为当前高速定位控制提供操作指导。在定位过程中通过预测位置与实际位置比较,灵活调整定位速度。实验表明神经网络预测控制是实现高速高精度定位的有效手段。 To realize the high-speed and high-precision positioning,a multi-step predictive control system is established on the basis of the single-step predictive model of the RBF neural network,thus providing the operation guide to the current high-speed positioning.During the alignment,the alignment speed is adjustable flexibly by comparing the predictive position with an actual postion.The experiment result shows that the neural-network-based predictive control is an effective means to perform high-speed and high-precision positioning.
出处 《工业仪表与自动化装置》 2005年第3期41-44,共4页 Industrial Instrumentation & Automation
关键词 预测模型 莫尔 神经网络 精密定位 prediction model moire neural network precision positioning
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参考文献4

  • 1Liu Jing-Nan,Uchida Yoshiyuli.Precision Alignment of Pulse Stage Using Moire Signals[C].Proceedings of the 41st SICE Annual Conference,(Osaka,Japan),2002,Volume.1:382-385.
  • 2Futami,S.Nakamura,H.High-speed precision numerically controlled tapping using dual predictive control[C].Proceedings of 6th International Workshop on Advanced Motion Control,(Nagoya,Japan),2000,396-400.
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  • 4张金龙,余玲玲,刘京南.超精密定位的定位方法[J].工业仪表与自动化装置,2004(5):28-30. 被引量:5

二级参考文献4

  • 1Jingnan Liu,Yoshiyuli Uchida.Precision Alignment of Pulse Stage Using Moire Signals[J].Proceedings of the 41st SICE Annual Conference.2002,1:382-385.
  • 2Uchida Y,Hattori S,Nomura T.An automatic mask alignement technique using moire interference[J].Journal of Vacuum Science and Technology,1987,B5:244-247.
  • 3Alok Kumar Kanjilal.Automatic mask alignment without a microscope[J].IEEE Transactions on Instrumentation and Measurement,1995,44(3):806-809.
  • 4G.Bouwhuis and Wittelock.Automatic alignment technique for optical projection printing[J].IEEE Trans.Electron Devices,1979,ED-26(4).

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