类金刚石薄膜的表面性能研究

Surface Performance of Diamond-like Carbon Thin Film

利用微波-ECR等离子体源全方位离子注入设备,采用PSII与PSII+PECVD工艺在医用316L不锈钢上制备碳改性薄膜.Raman光谱分析表明,薄膜为典型的类金刚石(DLC) 薄膜.静态接触角测量技术研究表明:在酸碱溶液中,DLC薄膜表面价键遭到破坏,稳定性降低.不同工艺制备的DLC薄膜表面能在40mN/m左右,极性分量大于色散分量,呈现出疏水性质.DLC薄膜表面能高低取决于表面碳碳键与粗糙度的变化.

Carbon films were synthesized on biomedical 316L stainless steel through twinned microwave ECR plasma source enhanced magnetron sputtering system. Visible Raman spectra show the films are typical amorphous DLC films. By measuring the static contact angles with the sessile-drop method, the wettability of DLC films was characterized. The surface energy of the DLC film is 40mN/m or so, and the polar component of surface tension is greater than the dispersive p art, which is hydrophobic. The fact indicates that the solutions with strong acidic and alkali properties, exert a weak destructive action on DLC films. The surface energy of DLC films is dependent on the carbon bonds and surface roughness.