VHF-PECVD制备微晶硅材料及电池

Microcrystalline Silicon Material and Solar Cells Fabricated by VHF-PECVD

采用VHF PECVD技术制备了不同功率系列的微晶硅薄膜和电池,测试结果表明:制备的适用于微晶硅电池的有源层材料的暗电导和光敏性都在电池要求的参数范围内.低功率或高功率条件下,电池从n和p方向的喇曼测试结果是不同的,在晶化率方面材料和电池也有很大的差别,把相应的材料应用于电池上时,这一点很重要.采用VHF PECVD技术制备的微晶硅电池效率为5%,Voc=0 45V,Jsc=22mA/cm2,FF=50%,Area=0 253cm2.

A series of microcrystalline silicon films and s olar cells are deposited at different powers using VHF-PECVD.The results of dark conductivity and photosensitivity show active materials deposited are suitable for the application of solar cells.Raman results of solar cells measured from p and n sides are different.Crystalline volume fraction (X c) of materials and solar cells have evident dissimilarity,which is very important for solar cells.Conversion efficiency 5% of microcrystalline silicon solar cells is obtained.