磁透镜技术及其在沉积金刚石/类金刚石薄膜中的应用

The Technique of Magnetism Lens and the Use in Sedimentation DF/DLC

阐明了磁透镜原理,依照磁透镜理论和几何光学理论,给出一种确定磁透镜位置的方法。并将磁透镜技术应用到直流等离子射流化学沉积金刚石薄膜/类金刚石薄膜装置中,很好地消除了边界效应,实现高速大面积沉积高纯度金刚石薄膜/类金刚石薄膜的目标。

This paper expounds the theory of magnetism lens. According to the theory, the formula and geometrical optics theory, the writer finds out a way that can decide the position of magnetism lens. Based on the results above, the technique of magnetism lens used in DC Plasma Jet CVD has achieved ideal effect that can clear up the boundary effect, reach the aim of the super-speed and big area sedimentation to accumulate the rather pure diamond thin film.