用磁控溅射技术制备钛合金表面HA生物涂层

Hydroxyapatite Coating Deposited on Ti-6Al-4V by RF Magnetron Sputtering

目的 探讨磁控溅射法制备的HA生物涂层组织结构以及涂层与基体的界面结合性能。方法 利用射频磁控溅射技术在Ti-6Al-4V基体表面制备HA生物涂层,利用扫描电镜(SEM)观察HA生物涂层表面形貌和断面形貌,利用X射线衍射仪(XRD)分析涂层的相结构,利用能量分散谱仪(EDS)分析涂层的Ca/P比,采用环氧树脂E-7对接法测定HA涂层与基体的界面结合强度。结果 溅射HA生物涂层的Ca/P比为1.7,后处理生物涂层中不存在其它钙磷杂质相,HA的晶化程度高,HA涂层与基体的界面结合强度为51.2MPa。结论 射频磁控溅射技术制备的HA生物涂层,表面形貌良好,涂层与基体的界面结合强度较高。

Objective To study the microstructure of HA bioactive coating deposited by magnetron sput-tering and the interface between coating and substrate. Methods HA bioactive coating was deposited on Ti-6Al-4V substrate by radio frequency magnetron sputtering technique. Scanning electron microscopy (SEM), X-ray diffraction (XRD) and Energy dispersive spectroscopy (EDS) were used to characterize the HA coating. Bonding strength between coating and substrate was tested according to ASTM-C633. Results The Ca/P atomic ratio of HA coating was 1.7. The amorphous phase of calcium phosphate was re-crystallized entirely and re-changed into HA after post-treatment. The bonding strength of the interface was 51.2 MPa. Conclusion HA bioactive coating obtained by radio frequency magnetron sputtering was uniform and dense. Its surface had a textured appearance and the bonding strength was high.