GaN材料湿法刻蚀的研究与进展

Research and Progress of Wet Etching for GaN

回顾了近年来GaN材料湿法刻蚀的研究进展,着重探讨了GaN材料光辅助化学湿法刻蚀的机理、p-GaN材料湿法刻蚀的难点以及湿法刻蚀在GaN材料研究中的应用。

The progress of wet etching for GaN is reviewed. We have discussed the mechanism of photo-assisted chemical wet etching,the difficulty of p-GaN wet etching and the application of wet etching in the research of GaN.